Measurement of physical and optical properties of thin films with an ellipsometric technique
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Date
2010.
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Thesis (M.S.)-Bogazici University. Institute for Graduate Studies in Science and Engineering, 2010.
Abstract
In this thesis, working mechanism of ellipsometer is studied in details. Thickness and refractive index of polyethyleneglycol(PEG), gold and silicon dioxide lms are measured using an elipsometer. PEG is attached to a gold coated surface on a BK7 glass using a chemical synthesis method. Potasiumcloride is used to control the relative humidity of the enviroment for insitu measurments of the humidity dependent thickness of PEG polymer lm. The PEG thicknesses, which correspond to certain relative humidity levels, are measured using the ellipsometry. It is observed that the thickness increases with the increasing humidity. Apart from PEG thickness and refractive indices of SiO2 and gold lms are measured.