Determination of optical constants of thin films

Abstract

In this thesis, a new approach is explored to determine the optical constants of thin dielectric layers. This study is based on the measurement of the reflection at various angles to determine the optical constants of a thin film. For this reason, this method allows using absorbing or non-transparent substrates. Study consists of not only theoretical derivations but also experimental measurements. A 650 nm laser diode was used as a light source and the reflected light from the surface of the film was measured by the BPX65 silicon photodiode. These reflection values were taken at various angles and numerical calculations were carried out. Results were consistent with previous studies. In addition, this method provided more information about the thin film, such as extinction coefficient, which was neglected in previous studies.